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Integration of electrodes in Si channels using low temperature polymethylmethacrylate bonding

V. Dukkipati and S. Pang

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 25 (2), 368-72 (2007)

Posted by hkt to molecular biophysics DNA Capillarity channel flow integrated circuits integrated circuit bonding adhesive bonding Adhesives Polymers glass Electrodes gold Chromium elemental semiconductors Silicon on Tue Aug 07 2007 at 18:05 UTC | info | related

Fully integrated optical system for lab-on-a-chip applications

info:doi/10.1109/mems.2004.1290529

Compilation and indexing terms, Copyright 2006 Elsevier Inc. All rights reserved; T3: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Posted by hkt to bonding Adhesives Polymethyl methacrylates glass waveguides Substrates lithography Ultraviolet radiation Photodetectors Dye lasers Microprocessor chips Optical systems on Tue Aug 07 2007 at 17:53 UTC | info | related

Anodic bonding of imperfect surfaces

Thomas Anthony

Journal of Applied Physics 54 (5), 2419-28 (1983)

Posted by hkt to mathematical models stresses viscous flow deformation plasticity Elasticity electric potential electrostatics glass metals bonding surfaces on Tue Aug 07 2007 at 17:51 UTC | info | related

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