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Immersion scatterometry for improved feature resolution and high speed acquisition of resist profiles
info:doi/10.1117/12.599135
Posted by eyliu to scatterometry metrology on Sat Aug 12 2006 at 02:50 UTC | info | related
 
Specular spectroscopic scatterometry
IEEE Transactions on Semiconductor Manufacturing 14 (2), 97 (2001)
info:doi/10.1109/66.920722
Posted by eyliu to scatterometry metrology on Sat Aug 12 2006 at 02:49 UTC | info | related
 
Scatterometry measurement of sub-0.1 μm linewidth gratings
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 16 (1), 80 (1998)
info:doi/10.1116/1.589840
Posted by eyliu to scatterometry metrology on Mon Jun 26 2006 at 18:49 UTC | info | related
 
Erratum to “Spectroscopic ellipsometry and reflectometry from gratings (Scatterometry) for critical dimension measurement and in situ, real-time process monitoring” 6Thin Solid Films 455–456 (2004) 828–8369
Thin Solid Films 468 (1-2), 339 (2004)
info:doi/10.1016/j.tsf.2004.06.099
Posted by eyliu to spectroscopic ellipsometry scatterometry metrology on Mon Jun 26 2006 at 18:46 UTC | info | related

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