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Design of CMOS MEMS Based on Mechanical Resonators Using a RF Simulation Approach
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems 23 (6), 962 (2004)
This paper, which is mostly tutorial in nature, deals with the design of CMOS microelectromechanical systems MEMS using standard microelectronic computer-aided design tools. The proposed case study is an on-chip spectrum analyzer with an electronic mixer and a mechanical filter. Based on both analytical modeling and characterization, the filter is described using an analog hardware description language. System level simulations are then performed using a recently released simulation tool that offer new possibilities regarding the analysis of multidomain, multifrequency designs. Presented results include periodic steady state determination, small-signal analysis and noise investigation. The simulations demonstrate the ability of the proposed system to identify the harmonics of a 50-Hz square-wave signal, owing to the selectivity of the mechanical filter.
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